Lambda Physik Gator Laser Series Receives Advanced Packaging - Wafer Dicing Award at Semicon West 2001

FT. LAUDERDALE, Fla., Aug. 10 -- Lambda Physik was presented the 2001 Advanced Packaging Award in the category of Wafer Dicing for the new Gator series diode-pumped solid-state lasers (DPSSL) at Semicon West, San Jose, CA. A panel of independent, international judges evaluated the Gator Series based on innovativeness, cost effectiveness, speed/throughput, improvements, quality contribution, ease of use, maintainability/repairability and environmental responsibility.
The Gator Series cuts, drills and machines microfeatures in semiconductor and MEMS wafer materials at production speeds with no redeposition of material or microcracking. Its near-diffraction-limited beam quality produces small focus spot sizes (under 6 microns with Gator 355), to create narrow kerf widths for wafer segmentation applications, and high quality microvias under 20 microns diameter.
Lambda Physik AG is a worldwide manufacturer of high-power, pulsed-UV and tunable laser sources for lithographic, industrial, scientific and medical applications.