The compact HiPace turbopumps from Pfeiffer Vacuum Inc. are available in pumping speeds ranging from 10 to 700 l/s. Their rotor design reduces run-up time, provides high gas throughput and suitable compression for light gases, and features foreline pressure tolerance and lower weight. The devices are offered in a variety of drive versions, including Profibus and DeviceNet, without an increase in package size. Their integrated drive electronics reduce the need for cabling. They can be installed in many orientations and are available in corrosive gas versions. Applications include analytical instrumentation and vacuum processes as well as semiconductor technology.

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