The UP193-FX from New Wave Research Inc. is a 193-nm, short-pulse excimer laser ablation system for bulk and micro-feature analysis. With a sub-5-ns pulsewidth, the laser provides up to 4 GW/cm² irradiance at the sample at one of 13 precalibrated spot sizes from 2 μm and up. The system provides depth profiling of <100 nm per shot, measures 50 × 32 × 74 in. with an optional cart, and is compatible with all commercially available inductively coupled plasma mass spectrometers. Options include a trinocular microscope, a mass-flow controller, data reduction software, an optical attenuator, specialized sample chambers and an autofocus feature.

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