KLA-Tencor Corp. has released the Candela CS20 automated wafer inspection system suitable for defect management in the production of high-brightness LEDs. Based on proprietary multichannel detection technology, it can inspect transparent wafers and epilayers for micropits and other defects, nondestructively and at a rate of up to 25 wafers per hour. The system combines optical profilometry, scatterometry, phase-shift and reflectometry methods to achieve sensitivity to varying spatial signatures. It detects crystal defects, lattice mismatch, stains and particles, and its automated classification enables manufacturers to filter out nuisance defects and focus on those of interest.

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