The Environmental MEMS Chamber released by MicroPhotonics Inc. allows users to control environmental conditions while performing in-plane and out-of-plane stroboscopic interferometric microscopy. Users can do electrical and mechanical testing within environmental parameters, such as temperatures from –25 to 65 °C, various gases and vacuum to 10^–6 millibars. This supports studies regarding stroboscopic deformation shape measuring, vibration, amplitude vs. frequency or time measurements, static and dynamic device deflection (quality, rise/fall time), mode shapes, resonant frequency and quality factor evaluation. All studies can be performed in electrostatic, piezo or thermal actuation.

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