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Scatterometers
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Scatterometers
A scatterometer is an instrument used to determine the absolute or relative scatter levels of optical surfaces.
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Glossary
scatterometer
An instrument used to determine the absolute or relative scatter levels of optical surfaces.
scatterometry
A measurement technique used for the rapid quantitative evaluation of surface quality based on the detection and analysis of light scattered from the surface.
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scatter levels
scatterometry
scatterometric measurement
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