Modular Process Technology Corp. | Photonics Buyers' Guide

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Modular Process Technology Corp.

2233 Paragon Dr.
San Jose, CA 95131
United States

Phone: (408) 325-8640
Fax: (408) 325-8649

Supplies rapid thermal processing (RTP) solutions for silicon, compound semiconductor, integrated photonics and MEMS device processing. Offers compact multigas systems for R&D and pilot production, as well as dual-susceptor autoload systems and multichamber RTP systems for production level processing.

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