The OptiSurf 300 unveiled by Trioptics GmbH
is a noncontact optical scanning deflectometer that provides high-speed surface topography measurements on a nanometer scale. It scans at a rate of >100,000 samples per second with high spatial resolution. It features a 300-mm measuring area, a beam diameter of ~0.7 mm, lateral sampling resolution of 0.2 mm, sensor slope dynamic range of 5 mrad and sensor slope resolution of 2 µrad. Applications include LCD glass, semiconductor wafers, free-form surfaces and aspheric optics.
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